Production process for an interface unit and a group of such interface units

ABSTRACT

A process for producing an interface unit and also a group of such interface units are specified. The interface unit exhibits a first reference surface for beaming in radiation, a second reference surface for emitting the radiation, and an axis extending in the direction from the first to the second reference surface. The production process comprises the steps of setting an optical path length of the interface unit between the first and second reference surfaces along the axis and the fixing of the set optical path length of the interface unit. The optical path length of the interface unit is set in such a way that radiation of a defined numerical aperture beamed in at the first reference surface exhibits a focus location that is predetermined with respect to the second reference surface in the direction of the axis. A precise and uniform focus location with respect to the second reference surface is obtained.

RELATED APPLICATION

The present application is a continuation of U.S. patent applicationSer. No. 12/894,305 filed Sep. 30, 2010, titled “PRODUCTION PROCESS FORAN INTERFACE UNIT AND A GROUP OF SUCH INTERFACE UNITS,” andInternational Application No. PCT/EP2010/005973 filed Sep. 30, 2010,titled “PRODUCTION METHOD FOR AN INTERFACE UNIT AND A GROUP OF SUCHINTERFACE UNITS,” the text of which is specifically incorporated byreference herein.

The invention relates to interface units for establishing the relativeposition between a radiation-source and an object to be irradiated. Inparticular, the invention relates to a production process for interfaceunits of such a type and to a group of such interface units. Theinterface units may also be designated as applicators or adapters. Tothe extent that they are employed in conjunction with radiation-sourcesfor the treatment/machining of human tissue, they can accordingly bedesignated as patient adapters.

BACKGROUND OF THE INVENTION

There are various forms of treatment that act by means of radiation on amaterial to be machined. For instance, ultraviolet radiation can triggera local crosslinking reaction after injection of a photosensitiser. Forprecise incisions, an accurate localisation of the beam focus of a laserradiation provided by the radiation-source at the desired position ofthe incision is also required. For this purpose the use of interfaceunits has proved useful, by means of which the object to be irradiatedis capable of being positioned with respect to a laser cutting deviceincluding the radiation-source.

The materials that are capable of being machined with the laser cuttingdevice may, in principle, be of any nature. They may be dead matter orliving (biological) material. An exemplary and by no means limitingfield of application of the interface units under consideration herelies in laser-surgical ophthalmology, in which incisions (e.g.individual incisions or complex incision figures) are to be generated inthe cornea or in other tissue parts of the human eye by means of focusedlaser radiation. This field includes, for example, fs LASIK (femtosecondlaser in-situ keratomileusis), in which a small disc generallydesignated in specialist circles by the English term ‘flap’ is cut outof the anterior region of the cornea by means of ultra-short-pulse laserradiation. The pulse durations that are used customarily are of theorder of magnitude of femtoseconds—hence the name fs LASIK. The pulsesare focused beneath the anterior surface of the cornea in the interiorof the tissue. By positioning the focal points in a desired incisionsurface, as a result the flap is cut out of the cornea. The flap remainsconnected to the cornea at a peripheral point and is folded aside for asubsequent ablation (resection of tissue by means of laser radiation) ofunderlying corneal tissue. After implementation of the ablation, theflap is folded back, and a relatively rapid healing takes place, withthe corneal surface remaining largely intact.

It will be understood that the interface units under consideration heremay also find application in any other treatment techniques that requiregeneration of an incision in corneal or other ocular tissue. It will beunderstood, furthermore, that the interface units under considerationwithin the scope of the invention may also come into operation in otherapplications that serve for the machining of other forms of biologicaltissue and even for the machining of dead matter with radiation, aboveall laser radiation.

In the case of medical applications, particularly in ophthalmology, forreasons of process engineering and hygiene it is additionally necessarythat the interface units are sterile articles which are employed anewfor each intervention or even for each incision. At the same time,especially in the case of eye operations, particularly stringent demandshave to be made of the cutting precision. For a high degree of cuttingprecision, in addition to an application-dependent form of the beamfocus (in shape and size) a high degree of positioning accuracy of thebeam focus in the target material is crucial. In the case of eyetreatments, for example, a cutting precision of at most a fewmicrometers, preferably less than 5 μm, is striven for. Ideally, thetissue incision should be able to be placed with an inaccuracy of nomore than 1 μm or 2 μm.

For the precision in the depth of incision that is being striven for, ahigh manufacturing accuracy of the interface units is required.Particularly in ophthalmology, the disposable character and theresulting necessity to provide the interface units in large numbersrepresent a great challenge for the achievement of the low manufacturingtolerances that are needed. An attempt may be made to predetermine thegeometrical dimensions of the interface units. Since the geometricalmanufacturing tolerances of the interface units then enter directly intothe inaccuracy of the depth of the incision in the tissue, an accuratereproducibility from piece to piece with respect to these geometricaldimensions has to be guaranteed in the course of production of theinterface units. For this purpose, on the basis of a reference interfaceunit a requisite distance between a reference surface facing towards thelaser cutting device and a reference surface facing towards the tissueto be treated may, for example, be predetermined and be put intopractice uniformly in the production process within the bounds of themanufacturing tolerance.

BRIEF SUMMARY OF THE INVENTION

It is an object of the invention to specify a production process forinterface units, so that deviations in the depth of focus, with or evenwithout a further increased manufacturing precision of the geometricaldimensions, are capable of being diminished.

This object is achieved by a process for producing an interface unitwith a first reference surface for beaming in radiation, with a secondreference surface for emitting the radiation, and with an axis extendingin the direction from the first to the second reference surface. Theprocess comprises the steps of setting an optical path length of theinterface unit between the first and the second reference surfaces alongan axis, and the fixing of the set optical path length. The optical pathlength of the interface unit is set in such a way that radiation of adefined numerical aperture which is beamed in at the first referencesurface exhibits a focus location which is predetermined with respect tothe second reference surface in the direction of the axis.

By piecewise setting (adjustment) of the optical path length of theinterface unit, in particular in the case of geometrical dimensions ofthe interface unit varying from piece to piece, the production processenables a predetermined focus location with respect to the secondreference surface to be obtained with the necessary accuracy largelyindependently of geometrical tolerances. With the subsequent fixing ofthe set optical path length, the interface unit is capable of beingproduced uniformly with regard to the focus location provided and can beemployed directly on a laser cutting device without further adjustment.

The optical path length of the interface unit may have been determinedby means of media of differing optical densities that are transparent tothe radiation between the first and second reference surfaces. Theoptical path length can be set by changing at least one of the opticaldensities. Alternatively or in supplement, by setting—in particular,displacing in the direction of the axis—at least one boundary surface ofthe media (e.g. a boundary surface between two media or an outer mediumboundary surface of the interface unit), the optical path length of theinterface unit between the first and the second reference surfaces alongthe axis can be set. In particular, the optical path length of theinterface unit can be set by rearranging the first and second referencesurfaces relative to one another in the direction of the axis. For thispurpose, the second reference surface may be a boundary surface of oneof the media that are transparent to the radiation. By fixing (therelative locations of) the boundary surfaces relative to one another,the optical path length can also be fixed.

The second reference surface may, for example, be constituted by asurface of a contact element that is substantially transparent to theradiation. This surface may be curved or plane. In the case of a designwith a plane surface, let the contact element be designated here as anapplanation plate, since it is then suitable for levelling soft materialfor irradiation (for instance, corneal tissue). In particular, thesecond reference surface may be a surface of a plane-parallelapplanation plate.

For the purpose of fixing the set optical path length of the interfaceunit the applanation plate is advantageously adhesion-bonded to asupport. In comparison with an alternative fixing by wedging or/andpress fit, by means of adhesion bonding a maladjustment of the setoptical path length of the interface unit by reason of material stressescan be avoided. The adhesion bonding may, for example, be triggered oraccelerated by using a UV-sensitive adhesive and UV irradiation.

The process may further include, preferably prior to the setting, aregistering of the optical path length of a medium of the interfaceunit, in particular of an applanation plate, by means of a measuringradiation along the axis. In this configuration only a segment of theoptical path length between the two reference surfaces is gauged, thissegment expediently being defined by boundary surfaces of one or more(but not all) of the optical media of the interface unit. Alternativelyor in addition, by means of the (or an additional) measuring radiationthe entire optical path length of the interface unit between the firstand second reference surfaces can be registered. For the purpose ofcontrolling an actuator rearranging the first and second referencesurfaces relative to one another in the direction of the axis, anactuating variable can be ascertained on the basis of the registeredoptical path length (or lengths). By virtue of a contactless registeringby means of the measuring radiation, the optical path length of the atleast one medium and/or of the interface unit overall can be monitoredadvantageously not only during the setting but also during the fixing.

The optical path length can be registered by means of interferometry,preferably by optical low-coherence reflectometry (OLCR). Interferometrypermits an extremely precise registering of the optical path lengthcorresponding to a wavelength of the measuring radiation employed, inwhich connection the low coherence does not make too stringent demandsof a radiation-source of the measuring radiation.

For the purpose of registering the optical path length (or lengths) bymeans of the measuring radiation that is beamed in, a focal beam may bebeamed in (in relation to which the radiation provided for the purposeof machining exhibits the defined numerical aperture). In this case anaccurate positioning (irrelevant for the later focus location in thecourse of the treatment) of the interface unit with respect to theradiation-source of the measuring radiation is not necessary.

The ascertainment of the actuating variable may include a calculation ofa geometrical length of the interface unit between the first and secondreference surfaces along the axis on the basis of the registered opticalpath length (or lengths) and the predetermined focus location. Theactuator is preferably designed to set the calculated geometrical length(directly). An iterative ascertainment of the actuating variable withrepeated registering and/or calculating for the purpose of correctingthe calculated length may, however, equally be possible.

As an alternative or in supplement to the metrological registering of anoptical path length, a measuring radiation with the defined numericalaperture may be beamed in at the first reference surface of theinterface unit. A signal of the measuring radiation can be registeredafter at least a single transit through the interface unit. The firstand second reference surfaces can be rearranged relative to one anotherin the direction of the axis in a manner depending on the registeredsignal, in particular in a manner depending on a deviation between theregistered signal and a reference signal. By means of a rearrangingcontrary to the deviation, a reference-point (of a controller, of anactuator or of an actuating variable) can be dispensed with.

The registered signal may, for example, characterise an actualwavefront, registered by an analytical detector, of the measuringradiation reflected on the second reference surface. The measuringradiation may, prior to the beaming into the interface unit, passthrough an optical system which, for example, is designed to project anafocal measuring radiation into the focal measuring radiation of thedefined numerical aperture, and prior to the analysis may pass throughthe optical system in the opposite direction.

A reference radiation may be coupled out of the measuring radiationexpediently prior to reaching the first reference surface and preferablyupstream of the aforementioned projecting optical system. The referencesignal may characterise an actual wavefront of the measuring radiationregistered by means of a reference detector. By comparison with theactual wavefront registered in the analytical detector, even in the caseof non-ideal measuring radiation, i.e. deviating from a plane wave, anaccurate adjustment is possible. To the extent that the referenceradiation is uninfluenced by the interface unit, given insufficient(temporal) stability of the measuring radiation that is beamed in, thenominal wavefront can be registered and stored once or at relativelylong time-intervals. Also, the analytical detector may serve at the sametime as reference detector by means of an appropriate arrangement.

A splitting mirror for coupling out both the reference radiation and thereflected measuring radiation is preferably employed. Accordingly, thereflected measuring radiation and the reference radiation can bedetected in a compact structural design. Furthermore, through the use ofa reflector in the reference beam the reference detector may bedispensed with and/or the rearranging in a manner depending on theactual wavefront may be supplemented by a preferably interferometricregistering of an optical path length of the interface unit (entire pathlength or only a fraction).

The invention further provides a group of interface units which eachinclude a first reference surface and a second reference surface. Thefirst reference surface serves for positioning the interface unit withrespect to a radiation-source with radiation of an aperture defineduniformly for the group. The second reference surface is spaced from thefirst reference surface by a geometrical length in the direction of theaxis of the interface unit. The second reference surface serves forpositioning an object for irradiation with respect to the interface unitand for emitting the radiation. Within the group, a variability of afocus location of the radiation in the direction of the axis withrespect to the second reference surface is smaller than a variability ofthe geometrical length. The variability may be an absolute variabilityor a relative variability relative to a mean value or nominal value. Avariance, for example, may serve as a measure of the variability withinthe group.

The interface units may each include a contact element, transparent tothe radiation, with a contact surface, forming the second referencesurface, for abutment against an object for irradiation. They may, inaddition, include a support for the contact element, forming the firstreference surface and exhibiting one or more coupling-abutmentstructures for coupling to a component of the radiation-source, inparticular to a focusing objective. The support may exhibit a retainingbody widening in the manner of a funnel, at the narrow end of which thecontact element is arranged.

The contact surface may be plane or curved (e.g. concave).

In a preferred configuration the interface units each exhibit a total oftwo media, transparent to the radiation and of differing opticaldensities, between the first and second reference surfaces, one of themedia being air and the other medium being constituted by the contactelement.

The group may, for example, be a batch from a production run of theinterface units. As a result, a simple interchange of the interfaceunits, in particular as disposable articles, is possible. An elaboratereadjusting, which is delaying in the course of an operation, of theradiation-source or of the positioning of the interface unit withrespect to the radiations-source can consequently be dispensed with.

BRIEF DESCRIPTION OF THE DRAWINGS

The invention will be elucidated further in the following on the basisof the appended drawings. Represented are:

FIG. 1: schematically, an arrangement of an exemplary interface unit forcoupling an object to be machined to a laser cutting device serving asradiation-source via the interface unit;

FIG. 2: schematically, a progression of a radiation beamed in withdefined numerical aperture through the interface unit and into theobject to be machined;

FIG. 3: an axial longitudinal section through the interface unit shownin FIG. 1;

FIGS. 4 to 6: schematically, apparatuses for various adjusting methodsfor application in the course of production of the interface unit shownin FIG. 1.

DETAILED DESCRIPTION OF PREFERRED EMBODIMENTS

FIG. 1 shows a laser cutting device denoted generally by 10 with aradiation-source 12 and with an interface unit 14 for cutting tissue inan eye 16. The radiation-source 12 includes an optical system 18 with afocal length f for focusing an incident parallel (afocal) ray bundle 20which a femtosecond laser (not shown) generates. An attachment surface22 of the radiation-source 12 extends parallel to and at a fixed spacingfrom a principal plane 24 of the optical system 18, so that the incidentparallel ray bundle 20 emerges at an opening 26 in the attachmentsurface 22 as a convergent (focal) ray bundle 28.

The interface unit 14 includes a conical spacing element (support) 30with an annular flange 32 at the wide end of the cone. The annularflange 32 forms an outer abutment surface 34 which defines the firstreference surface 35 of the interface unit 14. The abutment surface 34of the interface unit 14 in this particular application abuts theattachment surface 22 of the radiation-source 12 and is, for example,fixed thereto by a bayonet catch (not shown).

At the opposite (tapered) cone end of the spacing element 30 an opening36 for enclosing a contact element 38 that is transparent to theradiation is provided, here a biplanar applanation plate made of glassor plastic. The contact element 38 exhibits a plane outer surface 40,provided for abutment against the eye 16, as second reference surface 42of the interface unit 14. The contact element 38 is fixed in the opening36 with the outer surface 40 parallel to the first reference surface 35.Hence a geometrical spacing a between first reference surface 35 andsecond reference surface 42 can be specified as a dimension of theinterface unit 14.

The eye 16 is brought into abutment with its surface against the outersurface 40 of the contact element 38, for example by reduced pressure orby mechanical pressing. The laser radiation cuts the ocular tissue at afocal point 44 on an optical axis 46 which in this particularapplication is moved over the treatment surface in accordance with thedesired incision figure. The depth of incision in the ocular tissue isdetermined by a spacing, denoted in the following by c, between secondreference surface 42 and focal point 44. In the following, for thepurpose of clarity an optical axis 46 perpendicular to the referencesurfaces 35, 42 will be assumed.

Whereas the focal point 44 in the case of a free propagation (i.e. inthe absence of a contact element 38) would be situated at a spacing ffrom the principal plane 24 corresponding to the focal length of theoptical system 18, the depth of focus in the ocular tissue is displacedrearward by the contact element 38. FIG. 2 shows the displacementschematically. The focal ray bundle 28 falls into the interface unit 14(FIG. 1) through the opening 26 on the first reference surface 35 with anumerical aperture NA that is characteristic of the radiation-source 12.

A marginal ray 48 singled out from the incident focal ray bundle 28 inexemplary manner exhibits an angle α relative to the optical axis 46.The ray 48 passes through, as first optical medium 50, air with arefractive index n₀ and impinges at a point (0) on the contact element38 as second optical medium. Whereas without the contact element 38 theray 48 would intersect the optical axis 46 in rectilinear manner at apoint (1) and hence would define an undisplaced focal point (1) (virtualfocal point), by virtue of the higher refractive index n₁ a refractionof the ray 48 occurs with an angle β (<α) relative to the optical axis46. After the ray 48 has traversed the contact element 38 with thicknessb, the ray 48 passes at an angle γ relative to the optical axis 46 intothe ocular tissue denoted by 52 as third optical medium with arefractive index n₂. The ray 48 intersects the optical axis at a point(2) displaced along the axis by a spacing c in the beam direction. Sinceall the other rays of the ray bundle 28 also intersect at point (2),this is the rearward-displaced focal point 44. For the spacing c as afunction of the thickness b of the contact element 38 and as a functionof the angles of refraction α, β, γ it holds that:c=[(a ₍₁₎ −a)tan α+b(tan α−tan β)]/tan γ  (Eqn. 1)where a₍₁₎ denotes the spacing of the virtual focal point (1)predetermined by the focal length f of the optical system 18 (in thecase of an opening 36 not closed by the contact element 38) from thefirst reference surface 35 (i.e. a₍₁₎ is the focal length f minus thespacing between principal plane 24 and first reference surface 35). Thegeometrical length a is the spacing shown in FIGS. 1 and 2 between thefirst reference surface 35 and the second reference surface 42.

Consequently, manufacturing tolerances in the geometrical length abetween first reference surface 35 and second reference surface 42 ofthe interface unit 14 and also tolerances in the thickness b of thecontact element 38 enter directly into the incision depth c by way ofinaccuracy. A deviation Δb in the thickness b of the contact element 38results in an error Δf_(b) in the incision depth c:

$\begin{matrix}{{\Delta\; f_{b}} = {\Delta\; b\sqrt{n_{2}^{2} - {NA}^{2}}\left( {\frac{1}{\sqrt{1 - {NA}^{2}}} - \frac{1}{\sqrt{n_{1}^{2} - {NA}^{2}}}} \right)}} & \left( {{Eqn}.\mspace{14mu} 2} \right)\end{matrix}$where the refractive index n₀ of the air 50 is assumed to be n₀=1. Afurther error contribution Δf_(a) arises for the incision depth c byvirtue of a deviation Δa in the length a.

The interface unit 14 shown in FIG. 3 avoids the disadvantages of aninaccurate depth of focus c, in that in the course of production thedistance a between the first reference surface 35 and the secondreference surface 42 is set as a function of the thickness b actuallyobtaining in the given case or as a function of an optical thickness n₁bof the contact element 38.

In FIG. 2 the case a₍₁₎=a is shown—i.e. the virtual focal point (1)coincides with the outer surface 40 of the contact element 38. The aimof the production process is to set an optical path length of theinterface unit 14 between first reference surface 35 and secondreference surface 42 along an axis 47 of the interface unit 14 in such away that the focal point 44 again coincides with the outer surface 40(depth of focus c=0). This predetermined focus location serves in thelater particular application as ‘zero point’ for the focus control inthe direction of the optical axis 46. Of course, another virtual focalpoint (1) (with a₍₁₎≠a) may also be assumed, and another focus location(with depth of focus c≠0) may be predetermined for production. The axis47 of the interface unit 14 is tantamount to a cone axis of the conicalspacing element 30 (FIG. 1); the reference surfaces 35, 42 are orientedorthogonally to this (mechanical) axis 47. In the case where the opticalaxis 46 of the incident focal ray bundle 28 is equally orthogonal to thereference surfaces 35, 42, the axes 46, 47 are collinear.

The opening 36 in the spacing element 30 exhibits, in the exemplary casethat is shown, a circumferential enclosing surface 54 (alternatively,several adjacent enclosing surfaces). Independently of the adjustmentprocess, the contact element 38 is adhesion-bonded to the enclosingsurface 54 at the set optical path length.

In an embodiment the exact axial thickness b of the contact element 38is measured as a geometrical spacing of its inner surface 56 and theouter surface 40, and the geometrical length a along the axis 47 iscalculated therefrom, for example by solving the above Eqn. 1. In thecourse of production of the interface unit 14 the contact element 38 isthen moved along the optical axis 47 relative to the spacing element 30until the calculated length a for the measured thickness b givenpredetermined numerical aperture NA corresponds to the desired depth offocus c.

The above Eqn. 1 is of the linear formc=C ₀ +C ₁ ⁽¹⁾ a+C ₂ ⁽¹⁾ b  (Eqn. 1.1)where the coefficientsC ₀ =a ₍₁₎ tan α/tan γ,C ₁ ⁽¹⁾=−tan α/tan γn, andC ₂ ⁽¹⁾=(tan α−tan β)/tan γare permanently predetermined by the radiation-source 12, in particularthe optical system 18 (FIG. 1). For the purpose of setting the opticalpath length, instead of predetermining the geometrical variables a and bas nominal variables or registering them as actual variables, the entireoptical path length L_(S) of the interface unit 14 between the first andthe second reference surfaces 35, 42L _(S) =n ₀ a+(n ₁ −n ₀)b  (Eqn. 3)and/or the optical thickness L_(b) of the contact element 38L _(b) =n ₁ b  (Eqn. 4)can be taken as the basis for the adjustment. Corresponding conditionalequations follow from Eqn. 1.1 by inserting Eqns. 3 and 4:c=C ₀ +C ₁ ⁽²⁾ L _(S) +C ₂ ⁽²⁾ L _(b)  (Eqn. 1.2)c=C ₀ +C ₁ ⁽³⁾ a+C ₂ ⁽³⁾ L _(b)  (Eqn. 1.3)c=C ₀ +C ₁ ⁽⁴⁾ L _(S) +C ₂ ⁽⁴⁾ b  (Eqn. 1.4)c=C ₀ +C ₁ ⁽⁵⁾ a+C ₂ ⁽⁵⁾ L _(S)  (Eqn. 1.5)

For example, for the combination of variables (L_(S), L_(b)) of Eqn. 2the following hold:C ₁ ⁽²⁾ =C ₁ ⁽¹⁾ /n ₀ andC ₂ ⁽²⁾ =C ₂ ^((1)/) n ₁ +C ₁ ⁽¹⁾(1/n ₁−1/n ₀).

FIG. 4 shows an embodiment of an adjustment apparatus with a bearingtable 57 for the contact element 38. The latter protrudes axially beyondthe spacer 30 and is supported on the bearing table 57. The contactelement 38 is inserted into the spacing element 30 in such a way thatalthough it is held frictionally therein it is still capable of beingrearranged axially in relation to the spacing element 30 by means ofsuitable actuating forces. A definitive fixing is effected by adhesionbonding.

The bearing table exhibits a beam trap constituted by a cavity 58. Forthe purpose of signal amplification, in an alternative embodiment areflector surface 60 perpendicular to the axis 47 may have beenenclosed. Furthermore, an axially fixed interface-element support 62 isprovided, with a positioning surface 64.

A spacing-measuring instrument 70 is capable of sending a measuredvariable 72 representing the optical thickness L_(b) along the axis 47to a control unit 74. The control unit 74 derives from the measuredvariable 72 an actuating variable 76 which drives an actuator (notshown) which moves the bearing table 57 along the axis 47 relative tothe support 62.

The spacing-measuring instrument 70 operates in accordance with theprinciple of optical low-coherence reflectometry (OLCR). Thespacing-measuring instrument 70 generates an afocal laser beam andsplits the latter into a reference branch (not shown) and an afocalmeasuring beam 78. The working wavelength of the spacing-measuringinstrument 70 is preferably chosen to be in the vicinity of thewavelength of the radiation of the laser system 10. In the event of asignificant difference between the wavelength of the measuring beam 78and the wavelength of the laser system 10 suitable correction algorithmsmay be implemented in the control unit 74.

A first reflection arises on the inner surface 56 of the contact element38. The contact element 38 generates on the outer surface 40 a secondreflection corresponding to the axial location of the second referencesurface 42. The first and second reflections re-radiated into thespacing-measuring instrument 70 are in each instance caused to interferetherein with the reference branch, whereby the path length of thereference branch is lengthened or shortened in accordance with theinterference signal. From the reference-branch lengths for the firstreflection and for the second reflection the spacing-measuringinstrument 70 determines the optical thickness L_(b) of the contactelement 38 by way of measured variable 72.

During the adjustment the first reference surface 35 of the interfaceunit 14 is fixed on the positioning surface 64 and remains stationary;the outer surface 40 of the contact element 38 defining the secondreference surface 42 rests on a surface 60 of the table 57. As a result,the contact element 38 is capable of being rearranged in the directionof the axis 47 until attaining a spacing a calculated by the controlunit 74, for example in accordance with Eqn. 1.3, by way of actuatingvariable 76 for the measured optical thickness L_(b).

In a further development of this embodiment for the combination ofvariables (L_(S), L_(b)) a reflection plate 66 that is transparent tothe laser radiation is enclosed in the interface-element support 62. Thereflection plate 66 terminates towards the interface unit 14 with a flatreflection surface 68 flush with the positioning surface 64, so that thereflection plate 66 generates on the reflection surface 68 a thirdreflection of the measuring beam 78 corresponding to the axial locationof the first reference surface 35. By reason of the second and thirdreflections, the spacing-measuring instrument 70 generates a measuredvariable 72 representing the optical length L_(S) between the firstreference surface 35 and the second reference surface 42. The controlunit 74 calculates, for example in accordance with Eqn. 1.2, acorrecting actuating variable 76 from the optical measured variablesL_(S), L_(b). This has the advantage that an actuator can be employedwithout absolute length scale for the geometrical length a (and evenwithout length calibration).

FIG. 5 show an alternative in which the spacing-measuring instrument 70is immovably connected to a carrier 84 via a base 80 and props 82, sothat a receiver 87 fitted at one end of a stamp 86 is fixed with respectto the spacing-measuring instrument 70 while the actuator moves theinterface-element support 62, with the reflection plate 66 enclosedtherein, along the axis 47. The control of the actuator in a mannerdepending on the reflections generated on the first reflection surface35 and on the second reflection surface 42 is as described withreference to FIG. 4.

The stamp 86 and the receiver 87 may, for example, exhibit an axialpassageway in which a reduced pressure prevails, in order to aspiratethe contact element 38 in such a way that no undesirable curvature ofthe reflection surfaces is induced. This is, for example, attainable bymeans of an annular design of the passageway (intake port). In this way,an automatically separable linkage between receiver 87 and contactelement 38 is made possible for the adjustment.

In another embodiment (not shown), radiation of numerical aperture NA isbeamed in at the first reference surface 35, and the location of thefocal point 44 on the axis 47 (in the vicinity of the second referencesurface 42) is determined while the contact element 38 is being movedalong the axis 47 until the desired depth of focus c has been attained.The location of the focal point is determined by a CMOS sensor or CCDsensor (with its sensor surface at right angles to the axis 47), theposition of which along the axis 47 is controlled in such a way that aspot of light registered by the sensor assumes a minimal lateral extent.

FIG. 6 shows an embodiment of an adjustment apparatus which exhibits afocusing optical system 90 (represented by a single collecting lens)which is rigidly connected, in a manner not represented in any detail,to a support 92 for the interface unit 14 to be adjusted. The interfaceunit 14 is capable of being mounted on the support 92 in such a way thatits axis 47 is coaxial with the optical axis of the optical system 90.The adjustment apparatus further exhibits a laser radiation-source 94,the generated laser radiation of which (same wavelength as the lasersystem 10) impinges as parallel (afocal) ray bundle 96 on abeam-splitter 98 which splits the ray bundle 96 into a reference beam100 and a measuring beam 102. The reference beam 100 arrives at areference detector 104 in which a wavefront signal that isrepresentative of the progression of the wavefront of the reference beam100 is generated. The (still afocal) measuring beam 102 is beamed intothe optical system 90 with bundle axis coaxial with the axis 47 of theinterface unit 14 and is projected by said optical system onto a focalray bundle 106, the numerical aperture of which is identical to thenumerical aperture of the focused laser radiation provided for thepurpose of machining in the later particular application. Instead of alaser radiation-source 94, use may also be made of anotherradiation-source (preferably of similar mid-wavelength to that of thelaser system 10) that generates non-coherent radiation.

The spacing element 30 of the interface unit 14 is firmly connected tothe support 92. For this purpose the support 92 exhibits a suitableabutment surface for the annular flange 32 of the spacing element 30.Clamping means which are not represented in any detail may, for example,serve for separable clamping of the spacing element 30 on the support32.

The contact element 38 is, in turn, already inserted into the opening 36in the spacing element 30; however, it is not yet fixed therein but isdisplaceable relative to the spacing element 30 in the direction of theaxis 47. A positioning member which is not represented in any detail andwhich is capable of being rearranged in the axial direction is capableof being brought into separable engagement with the contact element 38,so that by actuation of the positioning member an axial relocation ofthe contact element 38 relative to the spacing element 30 is possible.

In a manner analogous to the preceding embodiments, also in theembodiment according to FIG. 6 the optical path length of the interfaceunit 14 between the two reference surfaces 35, 42 is rearranged byrelative axial relocation of the contact element 38 in relation to thespacing element 30. The rearrangement is effected in this case so far orfor so long until a signal derived from the measuring beam 102 and,concretely, from the transit of the convergent ray bundle 106 throughthe interface unit 14 satisfies a predetermined condition. In theexemplary case shown in FIG. 6, even though the optical system 90 andthe support 92 are fixed and the contact element 38 is capable of beingrelocated relative to this fixed assembly with the spacing element 30fixed thereon, it is of course conceivable to fix the contact element 38axially and to design the assembly consisting of optical system 90 andsupport 92 to be axially adjustable.

The setting of the interface unit 14 is effected with the proviso toplace the focal point 44 along the axis 47 into the second referencesurface 42 (i.e. depth of focus c=0). In order to be able to examinethis condition, the adjustment apparatus exhibits an analytical detector108 which analyses the wavefront progression of a ray bundle 110(reflection beam) reflected on the outer surface 40 of the contactelement 38 and coupled out by means of the beam-splitter 98. Givencorrect axial setting of the contact element 38, the radiation reflectedon the outer surface 40 is projected by the optical system 90 into aparallel (afocal) ray bundle, the wavefront progression of whichcorresponds to that of the reference beam 100. Once the contact element38 has been axially displaced in relation to this ideal state, thewavefront progression of the reflection beam 110 differs from that ofthe reference beam 100. The analytical detector 108 or an evaluatingunit incorporated therein or connected thereto compares the referencewavefront signal provided by the reference detector 104 (tantamount to anominal wavefront) with a wavefront signal ascertained for thereflection beam 110 and characterising the wavefront progression thereof(tantamount to an actual wavefront) and brings about, depending on adeviation between the two wavefront signals, an axial relocation of thecontact element 38 relative to the spacing element 30 until thisdeviation disappears or is minimised in accordance with predeterminedthresholds. Given sufficient concordance between the actual wavefrontand the nominal wavefront, the contact element 38 is fixed in its setaxial position relative to the spacing element 30, preferably again byadhesion bonding.

Insofar as in the case of the above adjustment process a measuring beamof the same numerical aperture as in the intended application isemployed, the interface unit 14 can be manufactured with such ageometrical length which guarantees that in the later application theaxial position of the focus lies exactly at the desired locationrelative to the second reference surface 42.

In all the aforementioned embodiments the abutment surface 34 mayprovide, instead of a circumferential flange 32, a three-point bearing(defining the first reference surface 35). In corresponding manner, theproduction process is applicable for a curved inner surface 56 or acurved outer surface 40 of the contact element 38. Additionally or insupplement, a transparent correction chamber (not shown) may have beenprovided in the spacing element 30 for the purpose of receiving a gas.The correction chamber is passed through by the axis 47. By raising orlowering the gas pressure in the correction chamber, the optical densityof the correction chamber and hence the optical path length of theinterface unit 14 along the axis 47 can be set. The set optical pathlength can then be fixed by closing the correction chamber.

The production process can be employed for the purpose of manufacturingeach interface unit for laser material-machining instruments in which astable positioning of the machining area is effected via the interfaceunit. The focus location 44 obtained with the production process isindependent of manufacturing tolerances of the geometrical dimensions ofthe spacing element 30, in particular its length in the direction of theaxis 47, and independent of manufacturing tolerances of the opticaldensity n₁ and geometrical dimensions of the contact element 38, inparticular its thickness b. At the same time, the focus location 44 withrespect to the outer surface 40 (and accordingly, for example, anincision depth in the target tissue) can be obtained with an accuracy ofa few micrometers, preferably less than 5 μm and in particular about 1μm. A group of correspondingly produced interface units 14 may exhibit avariability with regard to the geometrical length that exceeds thevariability of the depth of focus.

The invention claimed is:
 1. A group of interface units which eachinclude: a support element having a first reference surface forpositioning the interface unit with respect to a radiation-sourceproviding radiation of a numerical aperture defined uniformly for thegroup, a contact element coupled to the support element and having asecond reference surface, spaced from the first reference surface in adirection of an axis of the respective interface unit by a geometricallength, for emitting the radiation and positioning an object forirradiation with respect to the interface unit, wherein within the groupa variability of a focus location of the radiation in the direction ofthe axis with respect to the second reference surface is smaller than avariability of the geometrical lengths of the group of interface unitsas a result of fixing the contact element in position along the axissuch that the contact element is not displaceable along the axis.
 2. Thegroup according to claim 1, wherein: the contact element is transparentto the radiation and has a contact surface forming the second referencesurface for abutment against an object for irradiation; and the supportmember includes one or more coupling-abutment structures for coupling toa focusing objective or other component of the radiation-source.
 3. Thegroup according to claim 2, wherein the support member includes a bodywidening in the manner of a funnel, at the narrow end of which thecontact element is arranged.
 4. The group according to claim 2, whereinthe interface units each include a total of two media, transparent tothe radiation and of differing optical densities, between the first andsecond reference surfaces, one of the media being air and the othermedium being constituted by the contact element.